Multiple gate transistor having homogenously silicided fin end portions
AssigneeGlobalfoundries Inc.
InventorsSven Beyer, Patrick Press, Rainer Giedigkeit, Jan Hoentschel
Life of this patent
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Abstract
In a multiple gate transistor, the plurality of Fins of the drain or source of the transistor are electrically connected to each other by means of a common contact element, wherein enhanced uniformity of the corresponding contact regions may be accomplished by an enhanced silicidation process sequence. For this purpose, the Fins may be embedded into a dielectric material in which an appropriate contact opening may be formed to expose end faces of the Fins, which may then act as silicidation surface areas.
Claims23
A method, comprising:
- forming a dielectric material above end portions of a plurality of fins of a multiple gate transistor;
- forming an opening in said dielectric material so as to extend through said end portions;
- forming a contact region in a cross-sectional area of each of said end portions exposed in said opening;
- and
- forming a contact element in said opening, said contact element connecting to each of said contact regions.
A method of forming a contact element connecting to a multiple gate transistor, the method comprising:
- forming a dielectric material so as to enclose an end portion of one or more fins of said multiple gate transistor;
- forming a contact opening in said dielectric material, said contact opening exposing at least a portion of said one or more fins;
- and
- filling said contact opening with a metal-containing material so as to provide a contact element that connects to said at least a portion of said one or more fins.
A semiconductor device, comprising:
- a plurality of fins of a multiple gate transistor;
- a gate electrode structure formed above a central part of said plurality of fins;
- a dielectric material enclosing an end portion of each of said plurality of fins;
- and
- a metal-containing contact element formed in said dielectric material and having an interface with at least one surface area of each end portion of said plurality of fins.
Dependencies are inferred from the claim text.