Gas supply method and gas supply device

A gas supply device for supplying a source gas produced by heating and sublimating a solid source material in a source material container to a consuming area, the gas supply device comprising:

• a source material container for storing therein a solid source material;
• a heating unit for heating the solid source material in the source material container;
• a carrier gas inlet line provided between a carrier gas supply source and the source material container;
• a processing gas supply line provided between the source material container and the consuming area;
• a bypass line installed between the carrier gas inlet line and the processing gas supply line;
• a pressure measuring unit provided at a downstream side of a connecting position of the bypass line on the processing gas supply line;
• a flow path switching unit for switching a flow path of the carrier gas between a flow path for causing the carrier gas to flow from the carrier gas inlet line to the processing gas supply line via the bypass line and a flow path for causing the carrier gas to flow from the carrier gas inlet line to the processing gas supply line via the source material container;
• and
• a controller for controlling a flow rate of the source gas flowing in the processing gas supply line,
• wherein the controller performs:
• storing a reference data including a measured flow rate of the carrier gas and a pressure measurement value obtained by the pressure measuring unit while the carrier gas is flowing in the processing gas supply line via the bypass line;
• obtaining a pressure measurement value by the pressure measuring unit while the carrier gas having the unaltered flow rate and the source gas are flowing together in the processing gas supply line via the source material container;
• and
• calculating a flow rate of the source gas based on the measured pressure measurement values and the reference data.