Test Pattern Based Process Model Calibration

A system for performing process model calibration, the system comprising:

• at least one storage device to store machine-readable codes;
• a central processing unit (CPU) operationally connected to the storage device;
• and
• a controller controlling the storage device and the CPU,
• wherein the CPU is adapted to execute the machine-readable codes to:
• create a plurality of sub-process models for a set of sub-processes;
• create a lumped-process-model incorporating said set of sub-processes;
• calculate a first set of output patterns from a set of test patterns by using said plurality of sub-process models;
• calculate a second set of output patterns from said set of test patterns by using said lumped-process-model;
• and
• adjust process parameters used in said lumped-process-model to calculate said second set of output patterns to match said first set of output patterns.

A machine-readable medium having stored thereon a set of instructions that, when executed by a machine, result in

• create a plurality of sub-process models for a set of sub-processes;
• create a lumped-process-model incorporating said set of sub-processes;
• calculate a first set of output patterns from a set of test patterns by using said plurality of sub-process models;
• calculate a second set of output patterns from said set of test patterns by using said lumped-process-model;
• and
• adjust process parameters used in said lumped-process-model to calculate said second set of output patterns to match said first set of output patterns.