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US 2009/0266740 A1Published application
Wafer container with cushion sheet
AssigneeMiraial Co., Ltd.
InventorNobuyuki KASAMA
Life of this patent
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Abstract
A wafer container with wafer-mounting cushion sheets prevents breaking and damage of semiconductor wafers due to impacts or repetitive warping by maintaining the semiconductor wafer in a flat state and enables the semiconductor wafer to be removed safely and easily without damage. The surface of each wafer-mounting cushion sheet includes a self-sucking portion for exerting a removable vacuum on the semiconductor wafer and a non-sucking portion for enabling separation of the semiconductor wafer.
Claims21
A wafer container with a wafer mounting sheet comprising:
- a plurality of stacked wafer mounting trays that form interior spaces between adjacent wafer mounting trays;
- and
- an elastic wafer mounting cushion sheet in each interior space and adapted to retain a semiconductor wafer therein,
- wherein a surface of the wafer mounting cushion sheet includes self-sucking portions and non-sucking portions, said self-sucking portions selectively exert a vacuum on the semiconductor wafer and a fixing force by which the wafer mounting cushion sheet retains the semiconductor wafer is adjusted by varying an area density of the self-sucking portions.
1 more element
A wafer container with a wafer mounting sheet comprising:
- a plurality of stacked wafer mounting trays that form interior spaces between adjacent wafer mounting trays;
- and
- an elastic wafer mounting cushion sheet in each interior space and adapted to retain a semiconductor wafer therein
- wherein a surface of the wafer mounting cushion sheet includes self-sucking portions and non-sucking portions, the self-sucking portions selectively exert a vacuum on the semiconductor wafer and the non-sucking portions are formed at a position facing at least a part of an outer edge part of the semiconductor wafer.
1 more element
Dependencies are inferred from the claim text.