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AssigneeApplied Materials Baccini SPA Con Socio Unico
InventorAndrea BACCINI
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A drying apparatus for silicon or alumina-based plate elements, such as the type for electronics, or other types of plates for electronics, comprises an oven that develops along a path and having a drying chamber that develops along the path, on a relative lying plane. The oven has an entrance (21) into the chamber and an exit from the chamber. The plate elements are fed into the chamber from the entrance to the exit along the path by means of a translation unit in order to effect a drying cycle. The translation unit comprises planar support elements able to advance along the chamber, which are disposed along the path and orthogonally thereto and inclined downwards with respect to the lying plane of the chamber by a relative angle. The plate elements are disposed on the planar support elements so as to define, during normal use, a passage way for the drying air, also below the plate elements.
A drying apparatus for silicon or alumina-based plate elements, such as the type for electronics, or other types of plates for electronics, comprising an oven that develops along a path (X) and having a drying chamber that develops along said path (X), on a relative laying plane (P), wherein the oven has an entrance into the chamber and an exit from the chamber, the plate elements being able to be fed into the chamber from the entrance to the exit along the path (X) by means of a translation unit in order to effect a drying cycle, wherein the translation unit comprises planar support elements able to advance along the chamber, the planar support elements being disposed along the path (X) of the chamber and orthogonally thereto and inclined downwards with respect to the laying plane (P) by a relative angle (α, β), the plate elements being disposed on said planar support elements so as to define, during normal use, a passage way for the drying air, also below the plate elements.
A drying method for silicon or alumina-based plate elements, such as the type for electronics, or other types of plates for electronics, which provides, in a drying step, to use an oven that develops along a path (X) and having a drying chamber that develops along said path (X), on a relative plane (P), wherein the oven has an entrance into the chamber and an exit from the chamber, the plate elements being fed into the chamber from the entrance to the exit along the path (X) by means of a translation unit in order to effect a drying cycle, wherein the translation unit provides to use planar support elements which transport along the chamber the planar support elements, which are thus inclined downwards with respect to the plane (P) so that the drying air transits both above and below the plate elements.
Dependencies are inferred from the claim text.