Methods and apparatus for depositing an anti-reflection coating
AssigneeApplied Materials, Inc.
InventorMichael C. Smayling
Life of this patent
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Abstract
Systems, methods, and apparatus are provided for depositing an anti-reflection film on a substrate. A substrate is transported to a metrology tool. A characteristic of the substrate is measured, via the metrology tool. A recipe for an anti-reflection film is determined, based on the measured characteristic. The substrate is transported from the metrology tool to a process chamber. The recipe is employed to form an anti-reflection film on the substrate within the process chamber. Numerous other aspects are provided.
Claims20
A method for depositing an anti-reflection film on a substrate comprising:
- transporting a substrate to a metrology tool;
- measuring, via the metrology tool, a characteristic of the substrate;
- determining a recipe for an anti-reflection film based on the measured characteristic;
- transporting the substrate from the metrology tool to a process chamber;
- and
- employing the recipe to form an anti-reflection film on the substrate within the process chamber.
A controller for depositing an anti-reflection film on a substrate comprising:
- a memory;
- a processor coupled to the memory and adapted to execute program instructions including:
- direct a transfer robot to transport a substrate to a metrology tool;
- direct the metrology tool to measure a characteristic of the substrate;
- determine a recipe for an anti-reflection film based on the measured characteristic;
- direct the transfer robot to transport the substrate from the metrology tool to a process chamber;
- and
- direct the process chamber to employ the recipe to form an anti-reflection film on the substrate within the process chamber.
A system for depositing an anti-reflection film on a substrate comprising:
- a controller;
- a process chamber coupled, to and operable by, the controller;
- a transfer robot coupled, to and operable by, the controller;
- and
- a metrology tool coupled, to and operable by, the controller,
- wherein the controller is adapted to direct the metrology too to measure a characteristic of a substrate, direct the transfer robot to place the substrate in the process chamber, and direct the process chamber to deposit an anti-reflection film on the substrate using a recipe determined based on the measured characteristic of the substrate.
Dependencies are inferred from the claim text.