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US 2008/0304943 A1Published application
Substrate carrier and facility interface and apparatus including same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChen-Hua Yu, Yi-Li Hsiao
Life of this patent
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Abstract
A carrier comprises an enclosure, a cabinet and at least one substrate holder. The enclosure comprises a door. The cabinet is coupled to the carrier. The cabinet comprises at least one valve and contains at least one reduction fluid. The substrate holder is disposed within the enclosure to support at least one substrate.
Claims20
An apparatus, comprising:
- a sealed space defined by a plurality of walls;
- a sealed space door configured to cover an opening in one of said plurality of walls;
- a carrier comprising a carrier door configured to cover an opening in the carrier;
- a sealing apparatus disposed between the sealed space and the carrier to seal the carrier to the sealed space, the sealing apparatus surrounding the opening in said one of said plurality of walls and the opening in the carrier, wherein an included space is formed between the sealed space door, the carrier door and the sealing apparatus;
- a first valve coupled to the sealed space for introducing a first gas to the sealed space;
- and
- a second valve coupled to the included space for introducing a second gas to the included space.
4 more elements
A transfer interface system, comprising:
- a first enclosure comprising a first opening;
- a first door configured to cover the first opening,
- a first valve disposed in a wall of the first enclosure;
- a robot disposed within the first enclosure;
- a stage disposed adjacent the first opening for engaging a carrier;
- wherein the carrier comprises a second door, the carrier further having a cabinet coupled thereto, the cabinet having a second valve;
- and
- wherein a substrate holder is disposed within the carrier for engaging a substrate.
5 more elements
Dependencies are inferred from the claim text.