Spatial Light Modulator Device, Lithographic Apparatus, Display Device, Method of Producing a Light Beam Having a Spatial Light Pattern and Method of Manufacturing a Device

Spatial light modulator device for providing a spatial light pattern which is alterable in response to an electric signal, the spatial light modulator device comprising:

• a first modulator element with a pixel for receiving and in response to a first electric signal processing a first light beam,
• a second modulator element with a pixel for receiving and in response to a second electric signal processing a second light beam, the electric signal comprising the first electric signal and the second electric signal, and
• means for superimposing the first light beam processed by the first modulator element and the second light beam processed by the second modulator element for forming the spatial light pattern,
• the pixel of the first modulator element having in response to the first electric signal adjustable states comprising
• a first state for processing the first light beam such that a portion of the first light beam incident on the pixel is part of the spatial light pattern and
• a second different state for processing the first light beam such that the spatial light pattern is substantially free of the portion of the first light beam,
• the pixel of the second modulator element having in response to the second electric signal adjustable states comprising
• a first state for processing the second light beam such that a portion of the second light beam incident on the pixel is part of the spatial light pattern, and
• a second different state for processing the second light beam such that the spatial light pattern is substantially free of the portion of the second light beam,
• characterized in that the first modulator element and the second modulator element are arranged such that when the pixel of the first modulator element and the pixel of the second modulator element are in their respective first states, the portion of the first light beam and the portion of the second light beam in the spatial light pattern are arranged to substantially coincide.