Lithographic apparatus and device manufacturing method
AssigneeASML Netherlands B.V.
InventorsMartinus Cornelis Maria Verhagen, Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay
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AssigneeASML Netherlands B.V.
InventorsMartinus Cornelis Maria Verhagen, Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay
Estimating the term…
A lithographic apparatus is disclosed wherein a liquid supply system is configured to at least partly fill a region between a substrate and a projection system of the lithographic apparatus with a liquid and having a liquid confinement structure fixed in a plane substantially perpendicular to an optical axis of the projection system and configured to cooperate with a substrate table configured to hold the substrate in order to restrict the liquid to a region above an upper surface of the substrate table so that a side of the substrate to be exposed is substantially covered in the liquid during exposure.
A lithographic apparatus, comprising:
7-22. (canceled)
A device manufacturing method, comprising:
27-42. (canceled)
Dependencies are inferred from the claim text.