Method and device for the localized application of parting means
OwnerStefan Heininventor
Life of this patent
Estimating the term…
Abstract
A method for locally applying onto a moving substrate in a vacuum chamber a parting means preventing coating using a heatable vaporizer.
Claims27
1-27. (canceled)
A method comprising locally applying with a device for the localized application of a parting means preventing coating by means of a heatable vaporizer onto moving substrates in a vacuum chamber, which comprises at least one metal vaporizer, the parting means vaporizer comprising a first chamber with at least one heating body for the vaporization of the parting means as well as a second chamber extending parallel to the first chamber and connected with it, and comprising at least one nozzle directed onto the particular substrate, and with at least one setting valve for blocking the parting means supply, wherein
- a) the at least one setting valve is a proportional valve, which is disposed between the first chamber and the second chamber,
- b) the setting valve is disposed in one channel of the parting means vaporizer, which channel connects the first chamber with the second chamber, and
- c) the setting valve is implemented such that the vapor stream of parting means is specifically adjustable in terms of quantity as well as is also completely interruptible, wherein a parting means preventing coating by heating parting means in the first chamber to vaporize the parting means and transferring the vaporized parting means into the second chamber via the at least one setting valve, by
- a) keeping a vaporizer temperature in the vaporizer constant as much as possible,
- b) supplying the vapor from the first chamber via the at least one setting valve under control into the second chamber and in the second chamber initially parallel to the first chamber to the at least one nozzle, and
- c) closing the setting valve keeping it closed in the event the substrate stands still or is absent.
A method for the localized application of a parting means preventing coating with a vaporizer onto moving substrates in a vacuum chamber, comprising at least one metal vaporizer, the parting means vaporizing in a first chamber by heating and in vaporous form transferred via at least one setting valve into a second chamber provided with at least one nozzle directed onto the particular substrate, wherein
- a) the vaporizer temperature is kept as much as possible constant,
- b) the vapor from the first chamber is supplied via the at least one setting valve under control into the second chamber and in the latter initially parallel to the first chamber to the at least one nozzle and that
- c) the setting valve is closed and kept closed in the event the substrate stands still or is absent.
Dependencies are inferred from the claim text.