Heat treatment apparatus, computer program, and storage medium

A heat treatment apparatus for performing a specified heat treatment on a target object, comprising:

• an evacuable processing chamber;
• a mounting table on which the target object is mounted, the mounting table being disposed in the processing chamber;
• a lower heating unit for heating the target object, the lower heating unit being disposed in the mounting table or below the mounting table;
• a light transmitting window for airtightly covering a ceiling portion of the processing chamber;
• a gas introduction unit for introducing a required gas into the processing chamber;
• and
• a heating unit for emitting light for heating to the target object through the light transmitting window, the heating unit being disposed above the light transmitting window and having a plurality of heating sources each of which includes a semiconductor light emitting element.

A computer program for controlling a heat treatment apparatus which performs a specified heat treatment on a target object, the heat treatment apparatus comprising an evacuable processing chamber;

• a mounting table on which the target object is mounted, the mounting table being disposed in the processing chamber;
• a plurality of thermoelectric conversion elements disposed in an upper portion of the mounting table;
• a light transmitting window for airtightly covering a ceiling portion of the processing chamber;
• a gas introduction unit for introducing a required gas into the processing chamber;
• and a heating unit for emitting light for heating to the target object through the light transmitting window, the heating unit being disposed above the light transmitting window and having a plurality of heating sources each of which includes a semiconductor light emitting element, wherein, in case of heating the target object, the heating unit is turned on and an electric current is made to flow to the thermoelectric conversion elements to heat the target object, and, in case of cooling the target object, the heating unit is turned off and an electric current is made to flow to the thermoelectric conversion elements to cool the target object.

A computer program for controlling a heat treatment apparatus which performs a specified heat treatment on a target object, the heat treatment apparatus comprising an evacuable processing chamber;

• a mounting table on which the target object is mounted, the mounting table being disposed in the processing chamber;
• a lower heating unit for heating the target object, the lower heating unit being disposed in the mounting table or below the mounting table;
• a light transmitting window for airtightly covering a ceiling portion of the processing chamber;
• a gas introduction unit for introducing a required gas into the processing chamber;
• and a heating unit for emitting light for heating to the target object through the light transmitting window, the heating unit being disposed above the light transmitting window and having a plurality of heating sources each of which includes a semiconductor light emitting element, wherein, in case of heating the target object, the lower heating unit is turned on to heat the target object to a predetermined preliminary heating temperature and then the heating unit is turned on to raise the temperature of the target object to a predetermined processing temperature.

A storage medium storing therein a computer program for controlling a heat treatment apparatus which performs a specified heat treatment on a target object, the heat treatment apparatus comprising an evacuable processing chamber;

• a mounting table on which the target object is mounted, the mounting table being disposed in the processing chamber;
• a plurality of thermoelectric conversion elements disposed in an upper portion of the mounting table;
• a light transmitting window for airtightly covering a ceiling portion of the processing chamber;
• a gas introduction unit for introducing a required gas into the processing chamber;
• and a heating unit for emitting light for heating to the target object through the light transmitting window, the heating unit being disposed above the light transmitting window and having a plurality of heating sources each of which includes a semiconductor light emitting element, wherein, in case of heating the target object, the heating unit is turned on and an electric current is made to flow to the thermoelectric conversion elements to heat the target object, and, in case of cooling the target object, the heating unit is turned off and an electric current is made to flow to the thermoelectric conversion elements to cool the target object.

A storage medium storing therein a computer program for controlling a heat treatment apparatus which performs a specified heat treatment on a target object, the heat treatment apparatus comprising an evacuable processing chamber;

• a mounting table on which the target object is mounted, the mounting table being disposed in the processing chamber;
• a lower heating unit disposed in the mounting table or below the mounting table to heat the target object;
• a light transmitting window for airtightly covering a ceiling portion of the processing chamber;
• a gas introduction unit for introducing a required gas into the processing chamber;
• and a heating unit for emitting light for heating to the target object through the light transmitting window, the heating unit being disposed above the light transmitting window and having a plurality of heating sources each of which includes a semiconductor light emitting element, wherein, in case of heating the target object, the lower heating unit is turned on to preliminarily heat the target object until to reach at a predetermined temperature and then the heating unit is turned on to heat the target object until to reach at a predetermined temperature.