Hidden hinge MEMS device
AssigneeMicronic Laser Systems AB
InventorsPeter Enoksson, Martin Bring
Life of this patent
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Abstract
The present invention relates to a method for manufacturing a MEMS device, including the actions of: providing a substrate having a back and front surface essentially in parallel with each other, defining in said substrate at least one hidden support by removing material from said substrate, connecting said at least one hidden support onto a wafer with at least one actuation electrode capable to actuate at least a part of said substrate, wherein a rotational axis of said reflective surface is essentially perpendicular to said hidden support. The invention also relates to the MEMS as such.
Claims15
-9. (canceled)
A MEMS device comprising:
- a first substrate having at least one reflective surface;
- at least one hidden support, said hidden support being hidden underneath said reflective surface;
- at least one leg, wherein said at least one leg is having a first surface essentially perpendicular to said reflective surface and a second electrostatically attractable surface essentially in parallel with said reflective surface, wherein said electrostatically attractable surface is used to rotate the reflective surface around a rotational axis;
- and
- at least one actuation electrode provided on a second substrate, said second substrate being operable for actuating said reflective surface;
- wherein
- said second substrate is connected to said substrate and said rotational axis of said reflective surface is essentially perpendicular to said hidden support.
(canceled)
-18. (canceled)
(canceled)
Dependencies are inferred from the claim text.