Loading patent…
AssigneeKoninklijke Philips Electronics N.V.
InventorsMark Theo Meuwese, Diederik Van Lierop, Ronald Jan Asjes, Gerardus L.M. Jansen, Eric Cornelis Egbertus Van Grunsven, Dannis Michel Brouwer
Estimating the term…
The invention relates to a micro electromechanical device (1′) for tilting a body (2) in two degrees of freedom comprising a carrier element (3) and a membrane (4), the body (2) being connected via the membrane (4) to the carrier element (3), wherein the body (2) and the carrier element (3) each comprise at least one electrode (5,6). The body (2) is tilted by means of electrostatic forces (7) between the at least one electrode (5) of the body (2) and the at least one electrode (6) of the carrier element (3) by an application of a voltage (V1,V2) to said electrodes (5,6) from a voltage source.
A micro electromechanical device (1,1′,1″) for tilting a body (2,2a) in two degrees of freedom comprising a carrier element (3,3a) and a membrane (4,4a), the body (2,2a) being connected via the membrane (4,4a) to the carrier element (3,3a), wherein the body (2,2a) and the carrier element (3,3a) each comprise at least one electrode (5,6,6a) and wherein the body (2,2a) is tilted by means of electrostatic forces (7) between the at least one electrode (5) of the body (2,2a) and the at least one electrode (6,6a) of the carrier element (3,3a) by an application of a voltage to the electrodes (5,6,6a) from a voltage source (V).
Dependencies are inferred from the claim text.