Processing apparatus and device manufacturing method

A processing apparatus including a processing unit configured to process an object, the apparatus comprising:

• a conveying unit configured to convey the object between a transfer portion provided between an external apparatus and the processing unit, and the processing unit;
• a controller configured to output a request signal requesting the external apparatus to convey the object to the transfer portion;
• an output unit configured to output a signal indicating a start of maintenance of the processing apparatus;
• and
• a shutter configured to isolate, in the transfer portion, an approach area of a conveying unit of the external apparatus that conveys the object;
• wherein the controller controls and closes the shutter based on the signal indicating the start of maintenance output from the output unit, after outputting the request signal.

A method of manufacturing a device utilizing a processing apparatus including a processing unit configured to process an object;

• a conveying unit configured to convey the object between a transfer portion provided between an external apparatus and the processing unit, and the processing unit;
• a controller configured to output a request signal requesting the external apparatus to convey the object to the transfer portion;
• an output unit configured to output a signal indicating a start of maintenance of the processing apparatus;
• and a shutter configured to isolate, in the transfer portion, an approach area of a conveying unit of the external apparatus that conveys the object, wherein the controller controls and closes the shutter based on the signal indicating the start of maintenance output from the output unit, after outputting the request signal, wherein the processing apparatus is a device manufacturing apparatus, wherein the processing apparatus is an exposure apparatus, and the external apparatus is a photosensitive material coating and developing apparatus;
• the method comprising:
• exposing a substrate to radiant energy using the processing apparatus;
• developing the exposed substrate;
• and
• processing the developed substrate to manufacture the device.

A method of manufacturing a device utilizing a processing apparatus including a processing unit configured to process an object;

• a conveying unit configured to convey the object between a transfer portion provided between an external apparatus and the processing unit, and the processing unit;
• a controller configured to output a request signal requesting the external apparatus to convey the object to the transfer portion;
• an output unit configured to output a signal indicating a start of maintenance of the processing apparatus;
• and a shutter configured to isolate, in the transfer portion, an approach area of a conveying unit of the external apparatus that conveys the object, wherein the controller controls and closes the shutter based on the signal indicating the start of maintenance output from the output unit, after outputting the request signal, wherein the processing apparatus is a device manufacturing apparatus, wherein the processing apparatus is a photosensitive material coating and developing apparatus, and the external apparatus is an exposure apparatus;
• the method comprising:
• exposing a substrate to radiant energy;
• developing the exposed substrate using the processing apparatus;
• and
• processing the developed substrate to manufacture the device.

A method of manufacturing a device utilizing a processing apparatus including a processing unit configured to process an object;

• a conveying unit configured to convey the object between a transfer portion provided between an external apparatus and the processing unit, and the processing unit;
• a controller configured to output a request signal requesting the external apparatus to convey the object to the transfer portion;
• an output unit configured to output a signal indicating a start of maintenance of the processing apparatus;
• and a shutter configured to isolate, in the transfer portion, an approach area of a conveying unit of the external apparatus that conveys the object, wherein the controller controls and closes the shutter based on the signal indicating the start of maintenance output from the output unit, after outputting the request signal, wherein the processing apparatus is a device manufacturing apparatus, wherein the processing apparatus is a photosensitive material coating and developing apparatus, and the external apparatus is an exposure apparatus;
• the method comprising:
• coating a substrate with photosensitive material using the processing apparatus;
• exposing the coated substrate to radiant energy;
• and
• processing the exposed substrate to manufacture the device.