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US 2008/0184935 A1Published application
Clamping device for holding a substrate
AssigneeApplied Materials, Inc.
InventorThomas Klug
Life of this patent
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Abstract
The invention relates to a clamping device for holding a substrate. This clamping device includes a press-on fixture and a lower part, wherein at least the press-on fixture or the lower part includes at least a permanent magnet. If one of the two parts includes a permanent magnet, it suffices if the other part includes magnetizable material. A further permanent magnet can be provided, with which one end of the press-on fixture can be lifted up.
Claims14
A clamping device for holding a substrate, comprising:
- a lower part comprising a permanent magnet;
- at least one block disposed on the lower part;
- and
- a press-on fixture disposed on the at least one block, wherein the press-on fixture is pivoted swivellably in the block, and the press-on fixture is at least partially comprised of a magnetic or magnetizable material or includes a permanent magnet.
1 more element
A clamping device for holding a substrate, comprising:
- a block disposed on a lower part of the clamping device having a press-on fixture disposed therein, wherein the press-on fixture is swivellably pivoted in the block and is comprised of a magnetizable material or contains a magnet, and that a pusher comprising a magnet is provided above one end of the press-on fixture.
A clamping device for holding a substrate, comprising:
- a block disposed on a lower part of the clamping device having a press-on fixture disposed therein, wherein the press-on fixture is swivellably pivoted in the block and is comprised of a magnetizable material or contains a magnet, and that a pin comprising a magnet is provided above one end of the press-on fixture.
Dependencies are inferred from the claim text.