Apparatus and method for housing micromechanical systems
AssigneeFraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
InventorsThor BAKKE, Thilo SANDNER
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Abstract
An apparatus for housing a micromechanical system includes a substrate with a surface on which the micromechanical system is formed, a transparent cover and a dry film layer arrangement between the surface of the substrate and the transparent cover. The dry film layer arrangement has an opening, so that the micromechanical system adjoins the opening.
Claims22
An apparatus for housing a micromechanical or a micro-optoelectrical system, comprising:
- a substrate with a surface on which the micromechanical system is formed;
- a transparent cover;
- and
- a dry film layer arrangement between the surface of the substrate and the transparent cover,
- wherein the dry film layer arrangement comprises an opening, so that the micromechanical system adjoins the opening.
A method for housing a micromechanical or micro-optoelectrical system, comprising:
- providing a transparent cover;
- applying a dry film layer arrangement onto the transparent cover;
- patterning the dry film layer arrangement to produce an opening;
- bonding a surface of a substrate on which the micromechanical system is formed to the dry film layer arrangement, so that the micromechanical system adjoins the opening.
A system with an apparatus for housing a micromechanical or a micro-optoelectrical system, the apparatus comprising:
- a substrate with a surface on which the micromechanical system is formed;
- a transparent cover;
- and
- a dry film layer arrangement between the surface of the substrate and the transparent cover,
- wherein the dry film layer arrangement comprises an opening, so that the micromechanical system adjoins the opening,
- wherein the system is a laser-scanning projection display, a barcode reading device, an image pickup, a retina projection display, an optical detector or a spatial light modulator.
Dependencies are inferred from the claim text.