Process for wafer thinning
AssigneeGrace Semiconductor Manufacturing Corporation
InventorNan-Hsiung Tsai
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AssigneeGrace Semiconductor Manufacturing Corporation
InventorNan-Hsiung Tsai
Estimating the term…
The present invention relates to a process for thinning a semiconductor wafer. Two surfaces of the wafer separately form a surface-bond glue (layer) and a surface protective glue (layer). The thinning process is applied to the wafer before forming the surface protective glue. Once the baking and drying process is applied to the surface-bond glue and the surface protective glue it then cuts the wafer. Finally, it dissolves the lower solubility of the surface protective glue to obtain the finished goods. The necessity of the selection of the wafer may serve to maintain quality standards. The wafer thinning process of the present invention is suitable for the extremely thin wafer. Thus, it reduces the production cost.
A process for thinning a wafer, it is provided with a thinning process for a cutting-shape-laminated wafer, and comprises the steps of:
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Dependencies are inferred from the claim text.