Scanning probe microscope

Abstract

A scanning probe microscope (SPM) is provided capable of a narrow to a wide range observation according to observed targets or purposes without replacing a scanner while maintaining a high resolution. The SPM is provided with a probe-side scanner 10 and a sample-side scanner 11. The probe-side scanner 10 is to move the probe 13 in X-, Y-, Z-axis directions, and the sample-side scanner 11 is to move the sample 12 in the X-, Y-, Z-axis directions. A scanner with a small maximum scan range is used as the probe-side scanner 10; a scanner with a large maximum scan range is used as the sample-side scanner 11; and both can be switched between each scanner for use according to the observed targets or purposes. Alternatively, the probe-side scanner 10 is used for scanning in a narrow range, and the sample-side scanner 11 is used to move the field of view.

Dependencies are inferred from the claim text.