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US 2006/0213260 A1Published application
Atomic force microscope and method of energy dissipation imaging using the same
AssigneeJEOL Ltd.
InventorKeiichi Nakamoto
Life of this patent
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AssigneeJEOL Ltd.
InventorKeiichi Nakamoto
Estimating the term…
An atomic force microscope and method of energy dissipation imaging using such atomic force microscope. The atomic force microscope has a cantilever equipped with a probe for making contact with a sample, a vibrating unit for vibrating the cantilever, a vibration control unit for controlling the vibrating unit based on a preset value of amplitude, a vibration detector for detecting the amplitude of the vibration of the cantilever, and an imaging unit for creating an energy dissipation image based on the vibration of the cantilever. Error information based on the difference between the value of amplitude detected by the amplitude detection unit and the preset value of amplitude is fed back to the vibrating unit. Thus, the vibrating unit vibrates the cantilever to drive it into resonance. The imaging unit creates an energy dissipation image based on the difference information.
An atomic force microscope comprising:
A method of energy dissipation imaging adapted to be implemented with an atomic force microscope having a cantilever equipped with a probe for making contact with a sample, vibrating means for vibrating the cantilever, vibration control means for controlling the vibrating means based on a set value of amplitude, amplitude detection means for detecting the amplitude of the vibration of the cantilever, and imaging means for creating an energy dissipation image based on the vibration of the cantilever, said method of energy dissipation imaging comprising the steps of:
Dependencies are inferred from the claim text.