Yokeless hidden hinge digital micromirror device

A micromechanical device comprising:

• a substrate;
• a deflectable member disposed apart from the substrate and operable to deflect relative to said substrate about an axis;
• an intermediate layer disposed apart from said substrate and said deflectable member, said intermediate layer having at least one electrode and at least one deformable member having a contact point, said contact point of said deformable member operable to contact said deflectable member upon said deflection of said deflectable number;
• and
• wherein said electrode is located closer than said contact point to a projection of said axis onto the plane of the intermediate layer than said deformable member.

A method of forming a micromirror device, the method comprising:

• providing a substrate;
• forming an intermediate layer disposed apart from said substrate
• forming a deflectable member disposed apart from the intermediate layer and said substrate and operable to deflect relative to said substrate about an axis;
• wherein forming an intermediate layer comprises forming said intermediate layer having at least one electrode and at least one deformable member having a contact point, said contact point of said deformable member operable to contact said deflectable member upon said deflection of said deflectable number;
• and
• wherein said electrode is formed closer than said contact point to a projection of said axis onto the plane of the intermediate layer than said deformable member.

A display system comprising:

• a micromirror device comprising:
• a substrate;
• a deflectable member disposed apart from the substrate and operable to deflect relative to said substrate about an axis;
• an intermediate layer disposed apart from said substrate and said deflectable member, said intermediate layer having at least one electrode and at least one deformable member having a contact point, said contact point of said deformable member operable to contact said deflectable member upon said deflection of said deflectable number;
• and
• wherein said electrode is located closer than said contact point to a projection of said axis onto the plane of the intermediate layer than said deformable member;
• a light source for providing a beam of light to illuminate said micromirror device, said micromirror device spatially modulating said beam of light such that said modulated beam of light forms an image on an image plane.