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AssigneeTosoh Corporation
InventorsKenichi Itoh, Hitoshi Mashiko, Tetsuo Shibutami
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A hollow cylindrical ceramic sintered body having high density, a process for producing the sintered boy, and a cylindrical ceramic sputtering target having high quality without cracks or breakage, are disclosed. The hollow cylindrical ceramic sintered body is obtained by placing a cylindrical ceramic molding to be sintered on a plate-like ceramic molding having a coefficient of sintering shrinkage similar to that of the cylindrical ceramic molding, and then sintering the resulting assembly, thereby obtaining a hollow cylindrical ceramic sintered body having a relative density of 95% or higher. The cylindrical ceramic sputtering target is prepared using the hollow cylindrical ceramic sintered body.
A cylindrical sputtering target comprising a cylindrical substrate, and a target material comprising a hollow cylindrical ceramic sintered body, bonded to an outer surface of the cylindrical substrate, the ceramic target material having a relative density of 95% or higher.
A cylindrical sputtering target comprising a cylindrical substrate, and a target material comprising a hollow cylindrical ceramic sintered body, formed on an outer surface of the cylindrical substrate, the ceramic target material having a relative density of 99.7% or higher.
A hollow cylindrical ceramic sintered body for use as a target material of a cylindrical sputtering target, and having a relative density of 95% or higher.
A process for producing a hollow cylindrical ceramic sintered body, which comprises sintering a hollow cylindrical ceramic sintered boy, wherein a cylindrical ceramic molding to be sintered is placed on a plate-like ceramic molding having a coefficient of sintering shrinkage similar to that of the cylindrical ceramic molding, and the resulting assembly is sintered.
Dependencies are inferred from the claim text.