Back to results
US 2006/0151320 A1Published application
Tubular sputtering target
OwnerMartin Weigert, Markus Schultheis +2inventors
InventorsMartin Weigert, Markus Schultheis, Martin Schlott, Christoph Simons
Life of this patent
Estimating the term…
Abstract
A tubular sputtering target with a target body and with an attachment device arranged at at least one end of the target body. The attachment device and/or an end cover are joined with the target body by material joining or positive locking.
Claims11
A tubular sputtering target, comprising:
- a target body;
- and an attachment device arranged at at least one end of the body, the attachment device and/or an end cover being joined with the target body by material joining or positive locking.
Dependencies are inferred from the claim text.