Method of making a semiconductor device

Abstract

Disclosed is a method of making a semiconductor device in which a main pattern is formed through a photolithography process over a low-density pattern area having a relatively small number of patterns to be formed in certain areas as compared to the other areas. According to the method at least one or more dummy patterns are formed over the active areas, where the main pattern is formed, and adjacent inactive areas are spaced a predetermined distance from the sides of the main pattern. This method can improve the process margin and improve the uniformity of critical regions of patterns to thus improve the yield of a semiconductor device by making a low-density pattern area with the same pattern density as high-density or intermediate-density pattern areas by forming dummy patterns, which do not affect the semiconductor device, on the sides of a main pattern of the low-density pattern area according to a design rule.

Dependencies are inferred from the claim text.