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US 2006/0137460 A1Published application
Micromechanical component and method
AssigneeRobert Bosch GmbH
InventorsGerhard Lammel, Simon Armbruster, Frank Schaefer, Hubert Benzel
Life of this patent
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Abstract
A micromechanical component and a method for producing a micromechanical component are proposed, a hollow space and a region of porous silicon being provided, the region of porous silicon being provided for lowering the pressure prevailing in the hollow space.
Claims12
1-8. (canceled)
A micromechanical component, comprising:
- a body having a hollow space and a region of porous silicon located contiguously thereto, wherein the region of porous silicon is provided for lowering a pressure prevailing in the hollow space, in that gases are bound to the porous silicon.
A method for manufacturing a component, comprising:
- producing a micromechanical structure in a first substrate;
- producing in a second substrate a region of porous silicon;
- and
- joining the first substrate and the second substrate.
1 more element
A method for manufacturing a component, comprising:
- producing a region of porous silicon in a first substrate;
- producing in the first substrate a region of porous silicon;
- and
- joining a second substrate to the first substrate.
1 more element
A method for manufacturing a component, comprising:
- producing a region of porous silicon in a first substrate;
- and
- producing in the first substrate a region of porous silicon.
Dependencies are inferred from the claim text.