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AssigneesMitsubishi Chemical Corporation, Tokyo Denpa Co., Ltd.
InventorsKenji Yoshioka, Hiroshi Yoneyama, Katsumi Maeda, Ikuo Niikura, Mitsuru Sato, Masumi Ito
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An objective of the present invention is to provide a zinc oxide (ZnO) single crystal whose electroconductivity is excellent and which has a high quality. The invention relates to a zinc oxide single crystal whose concentration of metals other than zinc in the crystal fulfills the following equation: [−cM]/[+cM]≧3 wherein M is a metal other than zinc, [−cM] is a concentration of M in a −c region in the zinc oxide crystal, and [+cM] is a concentration of M in a +c region in the zinc oxide crystal.
A zinc oxide single crystal whose concentration of metals other than zinc in the crystal fulfills the following equation:
A zinc oxide single crystal whose concentration of iron (Fe) and/or aluminum (Al) in the crystal fulfills the following equation:
A zinc oxide single crystal whose concentration of a divalent metal and/or trivalent metal other than zinc in the crystal is 0.01 to 1.0 ppm.
A zinc oxide single crystal whose concentration of iron (Fe) and/or aluminum (Al) in the crystal is 0.01 to 1.0 ppm.
Dependencies are inferred from the claim text.