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AssigneeHoneywell International Inc.
InventorsJon DCamp, Harlan Curtis, Lori Dunaway, Max Glenn
Estimating the term…
A method for assembling a micro-electromechanical system (MEMS) device that includes a micro-machine is described. The method comprises forming the micro-machine on a die, the die having a top surface and a bottom surface, providing a plurality of die bonding pedestals on a surface of a housing, and mounting at least one of the top surface of the die and components of the micro-machine to the die bonding pedestals such that a bottom surface of the die at least partially shields components of the micro-machine from loose gettering material.
A method for assembling a micro-electromechanical system (MEMS) device, the device including a micro-machine, said method comprising:
-15. (canceled)
A method for mounting a micro-machine portion of a micro-electromechanical system (MEMS) within a housing portion of the MEMS which also contains a getter, said method comprising:
-23. (canceled)
A method for protecting components of a micro-machine within a housing from loose gettering material within the housing, the micro-machine formed on a die, said method comprising:
Dependencies are inferred from the claim text.