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AssigneeSumitomo Chemical Company, Limited
InventorsMasanobu Matsubara, Ken Shimada, Naohiro Nishikawa, Yoichi Kadota
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The present invention provides a trimethylgallium which has less than 0.1 ppm of a total organic silicon compound content; and a method for producing the trimethylgallium comprises hydrolyzing trimethylaluminum as a raw material, extracting organic silicon compound contained with a solvent, quantifying methyltriethylsilane by a Gas Chromatography-Mass Spectrometry, selecting a trimethylaluminum having less than 0.5 ppm of methyltriethylsilane content for the raw material, purifying by distillation, followed by reaction with gallium chloride and then distilling the reactant solution to obtain the trimethylgallium.
A trimethylgallium having less than 0.1 ppm of a total organic silicon compound content.
A method for producing a trimethylgallium comprising hydrolyzing trimethylaluminum as a raw material, extracting organic silicon compounds contained in the hydrolysate with a solvent, quantifying methyltriethylsilane by a Gas Chromatography-Mass Spectrometry, selecting a trimethylaluminum having less than 0.5 ppm of methyltriethylsilane content for the raw material, purifying the selected trimethylaluminum by distillation, followed by reaction with gallium chloride to obtain a reactant and then distilling the reactant solution to obtain a trimethylgallium.
Dependencies are inferred from the claim text.