Micromachined electromechanical device
AssigneeAgency for Science, Technology and Research
InventorsKui Yao, Xujiang He, Jian Zhang, Santiranjan Shannigrahi
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Abstract
A method for fabricating a MEMS device comprises providing a substrate having a back side, a front side opposite to the back side and a periphery portion. A desired microstructure is formed on the back side of the substrate. The substrate is then supported for rotation. A precursor solution is deposited on the front side of the substrate during rotation so that a thin film layer may be formed thereon. During formation of the thin film layer, the substrate is supported and rotated that the microstructure formed on the back side is protected.
Claims10
1-17. (canceled)
A substrate support for protecting a microstructure of a substrate during solution spin deposition, comprising:
- a rotatable base plate having a top surface;
- a seat coupled to the base plate for receiving the substrate to form a contacting interface, wherein the contacting interface is to separate the microstructure from the base plate, and
- a retaining member coupled to the base plate for securing the substrate to the base plate.
An MEMS device comprising:
- a substrate having a first side, a second side opposite to the first side and a cavity formed between the first side and the second side;
- a first piezoelectric thin-film structure formed on the first side of the substrate;
- and
- a second piezoelectric thin-film structure formed on the second side of the substrate.
Dependencies are inferred from the claim text.