US 2006/0066314 A1 · CAPACITIVE MONITORS FOR DETECTING METAL EXTRUSION DURING ELECTROMIGRATION

Abstract

A method and apparatus for detecting metal extrusion associated with electromigration (EM) under high current density situations within an EM test line by measuring changes in capacitance associated with metal extrusion that occurs in the vicinity of the charge carrying surfaces of one or more capacitors situated in locations of close physical proximity to anticipated sites of metal extrusion on an EM test line are provided. The capacitance of each of the one or more capacitors is measured prior to and then during or after operation of the EM test line so as to detect capacitance changes indicating metal extrusion.

Claims20

Dependent claims

A method for detecting metal extrusion associated with electromigration (EM) under high current density situations within an EM test line, the method comprising the steps of:

situating one end of an electrically conductive lead close to a single anticipated location of metal extrusion associated with electromigration on the EM test line, such that the end of the electrically conductive lead in combination with the single anticipated location of metal extrusion together comprise two charge storing surfaces of a single capacitor having an electrical capacitance;
measuring the capacitance of the single capacitor prior to operation of the EM test line;
making subsequent measurements of the capacitance of the single capacitor during or after operation of the EM test line;
and
detecting changes in the capacitance of the said single capacitor to detect metal extrusion associated with electromigration.

2 more elements

A method for detecting metal extrusion associated with electromigration (EM) under high current density situations within two or more EM test lines within a circuit, the method being characterized by the steps of:

situating the ends of one or more electrically conductive leads close to one or more anticipated locations of metal extrusion associated with electromigration on one of the two or more EM test lines, such that each end of each electrically conductive lead in combination with each of the one or more anticipated locations of metal extrusion on each of the two or more EM test lines together comprise two charge storing surfaces of one or more capacitors each having an electrical capacitance;
measuring the capacitance of each of the one or more capacitors prior to operation of the EM test lines;
making subsequent measurements of the capacitance of each of the one or more capacitors during or after operation of the EM test lines;
and
detecting changes in the capacitance of each of the one or more capacitors to detect metal extrusion associated with electromigration.

2 more elements

Dependencies are inferred from the claim text.

Capacitive monitors for detecting metal extrusion during electromigration

Life of this patent

Capacitive monitors for detecting metal extrusion during electromigration

Life of this patent

Abstract

Claims20