Varactors and methods of manufacture and use

A varactor comprising:

• a substrate;
• a plurality of bottom electrodes positioned on a surface of the substrate separated to form a gap therein;
• a tunable dielectric material positioned on the surface of the substrate and within said gap, said tunable dielectric at least partially overlaying said plurality of electrodes;
• and
• a top electrode in contact with said tunable dielectric.

A varactor comprising:

• a substrate;
• a plurality of bottom electrodes positioned on a surface of the substrate separated to form a gap therein;
• a tunable dielectric material positioned on the surface of the substrate and within said gap, said tunable dielectric at least partially overlaying said plurality of electrodes;
• a top electrode in contact with said tunable dielectric;
• and
• a plurality of interconnects on a surface of said plurality of electrodes enabling a connection to a voltage source.

A varactor comprising:

• a substrate;
• a first electrode positioned on a surface of the substrate;
• a second electrode positioned on the surface of the substrate forming a gap between the first and second electrodes;
• and
• a tunable dielectric material positioned on the surface of the substrate and within the gap.

A varactor, comprising:

• a bottom electrode supported by a substrate;
• a tunable dielectric in contact with said bottom electrode and in contact with a top electrode;
• and
• an interconnect in contact with said top electrode and capable of being in contact with a voltage source.

A varactor, comprising:

• a bottom electrode supported by a substrate;
• a first tunable dielectric in contact with said bottom electrode and in contact with a first top electrode;
• a second tunable dielectric in contact with said bottom electrode and in contact with a second top electrode;
• and
• a first interconnect in contact with said first top electrodes and a second interconnect in contact with said second top electrode, said first and second interconnects capable of being in contact with a voltage source.

A varactor comprising:

• a substrate;
• a plurality of bottom electrodes positioned on a surface of the substrate separated to form a gap therein;
• a tunable dielectric material positioned on the surface of the substrate and within said gap, said tunable dielectric partially overlaying said plurality of electrodes;
• a top electrode in contact with said tunable dielectric;
• and
• an interconnect layer in contact with at least a portion one of said plurality of bottom electrodes and portion of said top electrode, and a portion of said tunable dielectric.

A varactor comprising:

• a substrate;
• a plurality of bottom electrodes positioned on a surface of the substrate separated to form a gap therebetween;
• a tunable dielectric material positioned on the surface of the substrate and within said gap, said tunable dielectric partially overlaying said plurality of electrodes;
• a plurality of top electrodes in contact with said tunable dielectric;
• and
• an interconnect layer in contact with at least a portion one of said plurality of bottom electrodes and portion of said plurality of top electrode, and a portion of said tunable dielectric.

A varactor comprising:

• a substrate;
• a plurality of bottom electrodes positioned on a surface of the substrate separated to form a gap between said plurality of bottom electrodes;
• a tunable dielectric material positioned on the surface of the substrate and within said gap, said tunable dielectric partially overlaying said plurality of electrodes;
• a plurality of top electrodes in contact with said tunable dielectric;
• and
• an interconnect layer in contact with at least a portion one of said plurality of bottom electrodes and portion of said plurality of top electrode, and a portion of said tunable dielectric.

A varactor, comprising:

• at least one bottom electrode supported by a substrate;
• at least one top electrode with a tunable dielectric separating said at least one bottom and at least one top electrode;
• and
• an interconnect layer in contact with at least a portion one of at least one bottom electrode and portion of said at least one top electrode, and a portion of said tunable dielectric.

A varactor comprising:

• a substrate;
• a bottom electrode positioned on a surface of said substrate;
• a first tunable dielectric portion in contact with a first side of said bottom electrode and a portion of said substrate;
• a second tunable dielectric portion in contact with a second side of said bottom electrode and a portion of said substrate;
• a first interconnect in contact with a first side of said tunable dielectric and in contact with a first top electrode and a portion of said substrate;
• and
• a second interconnect in contact with a second side of said tunable dielectric and in contact with a second top electrode and a portion of said substrate.

A method of manufacturing a varactor, comprising:

• providing a substrate;
• positioning a bottom electrode on a surface of the substrate;
• placing a tunable dielectric material adjacent to and extending over said bottom electrode forming a step and in contact with a top electrode;
• placing an interconnect layer in contact with said bottom electrode, said tunable dielectric and said top electrode.

A method of manufacturing a varactor, comprising:

• providing a substrate;
• positioning a plurality of bottom electrodes on a surface of the substrate separated to form a gap therein;
• positioning a tunable dielectric material on the surface of the substrate and within said gap, said tunable dielectric at least partially overlaying said plurality of electrodes;
• and
• placing a top electrode in contact with said tunable dielectric.