System and method for modulating flow through multiple ports in a proximity head
AssigneeLam Research Corporation
InventorsJames Garcia, Fred Redeker, John Larios
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Abstract
A method of forming a dynamic liquid meniscus includes forming a meniscus at a first size, the meniscus being formed between a proximity head and a first surface and changing the meniscus to a second size by modulating a flow through at least one of a set of ports on the proximity head. A system for modulating flow through the ports in a proximity head is also described.
Claims20
A method of forming a dynamic liquid meniscus comprising:
- forming a meniscus at a first size, the meniscus being formed between a proximity head and a first surface;
- and
- changing the meniscus to a second size by modulating a flow through at least one of a plurality of ports in the proximity head.
A method of forming a dynamic liquid meniscus comprising:
- forming a meniscus at a first size, the meniscus being formed between a proximity head and a first surface, the proximity head having a plurality of ports, wherein a first plurality of fluid flow rates is supplied to the meniscus through the plurality of ports;
- and
- changing the first plurality of fluid flow rates to a second plurality of fluid flow rates by modulating a flow through at least one of the plurality of ports in the proximity head.
A proximity head system for flowing fluids to and from a surface of a substrate so as to define a meniscus, the proximity head comprising:
- a plurality of ports for flowing the fluids to and from the meniscus formed between the proximity head and the surface of the substrate, each one of the plurality of ports including a corresponding one of a plurality of valves.
Dependencies are inferred from the claim text.