US 2006/0040190 A1 · Method of forming an integrated optical circuit

Abstract

A method for forming an optical circuit on a substrate. The method comprising a plurality of mask images to define the optical circuit image in photoresist. Each of the mask images defining parts of the optical circuit and the totality of all mask images substantially defining all of the optical circuit. A photolithography system globally aligns and exposes the mask images in photoresist. The resultant composite image being substantially indistinguishable from a single image of the entire optical circuit. Different images for each of the parts can be substituted by other images, thereby exponentially increasing the number of circuit permutations from a predetermined number of images. The method is also applicable to generating a unique circuit from a pre-existing library of reticle images. The images are printed in predetermined locations on a substrate to define the desired optical circuit.

Claims8

Dependent claims

A method for forming an integrated optical circuit comprising:

(a) providing a substrate with a photoresist coating;
(b) providing a plurality of mask images, said mask images defining parts of said optical circuit and the totality of all mask images substantially defining all of said optical circuit;
(c) providing a printing means for exposing each of said images into said photoresist coating;
(d) providing means for mutually aligning each said image when printed into said photoresist coating;
(e) aligning and printing each of said images sequentially into said photoresist coating resulting in a complete image of said optical circuit in said coating;
and
(e) means for transferring said complete optical circuit image formed from the plurality of mask images from photoresist into said substrate,
whereby an optical circuit is formed that is essentially indistinguishable from an optical circuit that is printed by the application of a single image of the circuit.

5 more elements

Dependencies are inferred from the claim text.

Method of forming an integrated optical circuit

Life of this patent

Method of forming an integrated optical circuit

Life of this patent

Abstract

Claims8