Light source unit and light irradiation unit

A light source unit that generates light having a predetermined wavelength, said unit comprising:

• an ytterbium doped optical fiber amplifier that amplifies light having a wavelength near 1099 nm and outputs said amplified light as a fundamental wave;
• and
• a wavelength converter that converts said fundamental wave into a sevenfold wave of said fundamental wave to generate light having a wavelength near 157 nm, which is approximately the same wavelength as the oscillation wavelength of an F2 laser.

A light source unit that generates light having a predetermined wavelength, said unit comprising:

• an ytterbium doped optical fiber amplifier that amplifies light having a wavelength near 1095 nm and outputs said amplified light as a fundamental wave;
• and
• a wavelength converter that converts said fundamental wave into a triple wave of said fundamental wave to generate light having a wavelength near 365 nm, which is approximately the same wavelength as that of an i-line.

A light source unit that generates light having a predetermined wavelength, said unit comprising:

• at least one light output unit that outputs light having a wavelength near 1547 nm as a fundamental wave;
• and
• a wavelength converter in which a CsB3O5 crystal is used as a nonlinear optical crystal that generates light having a wavelength near 221 nm, which is a sum-frequency of said fundamental wave and a sixfold wave of said fundamental wave.