US 2006/0032611 A1Published application

Semiconductor device cooling apparatus

AssigneeFujitsu Limited

InventorAkihiko Fujisaki

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Abstract

In a semiconductor device cooling apparatus which cools a semiconductor device uniformly with a simple structure, a coolant is supplied from a supply port to the center of a heat transmission plate on which a semiconductor device is disposed in intimate contact therewith, is radially flown toward the peripheral edge portion of the heat transmission plate through a gap-shaped flow path which is formed by a gap forming plate composed of two thin plate members of a gap interval plate acting as a spacer and a gap top plate disposed on the gap interval plate and has a small height, is collected by a collection groove formed around the peripheral edge portion, and is discharged from a discharge port.

Claims3

Dependent claims

A semiconductor device cooling apparatus including a heat transmission plate that receives heat from a semiconductor device at approximately the center of an outer surface and forms a coolant flow path in contact with the inner surface of the heat transmission plate opposite to the outer surface thereof facing the semiconductor device, further comprising:

a coolant supply port that supplies a coolant to the central portion of the inner surface of the heat transmission plate;
a gap-shaped flow path sandwiched between the inner surface of the heat transmission plate and a surface that extends in parallel with the inner surface, the gap-shaped flow path radially flowing out the coolant supplied to the central portion of the inner surface of the heat transmission plate from the central portion toward the peripheral edge portion of the inner surface of the heat transmission plate;
a coolant collection groove which is formed around the peripheral edge portion and whose height from the inner surface of the heat transmission plate is larger than the height of the gap-shaped flow path to collect the coolant flowing out from the gap-shaped flow path;
and
a coolant discharge port that discharges the coolant collected in the coolant collection groove therefrom.

2 more elements

Dependencies are inferred from the claim text.