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AssigneeAlcatel
InventorsJean-Pierre Desbiolles, Johann Parrochon
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According to the invention, a process chamber (1), equipped with a vacuum line (4) with a main pump unit (3), is associated with a recirculation device (9) that collects part of the process chamber (1) outlet gases to filter them using a trap (11) and to reinject them via a process chamber (1) inlet (22). The recirculation device (9) is characterized by pressure sensor devices (7, 14) to measure the recirculation flow without causing pressure drops, so that the gas pressure in the recirculation device (9) remains low. This guarantees the device's operating safety, while improving its recirculation capacity.
A device for the generating and controlling of the cleaning agent flow, which may be used on a process chamber (1) to ensure its cleaning by a gas cleaning agent, comprising a recirculation device (9) suitable for collecting the gases leaving the process chamber (1) and for filtering them and reintroducing them into the process chamber (1), characterized by the fact that the recirculation device (9) is structured so that, at all points of their journey through the recirculation device (9), the recycled gases remain at the low pressure reigning in the process chamber to a noticeable degree.
Dependencies are inferred from the claim text.