Method and apparatus for temperature change and control

A distributed temperature control system for controlling a temperature of a plurality of equipment, each of the plurality of equipment having a channel that carries a heat-transfer fluid, the system comprising:

• a fluid thermal unit constructed and arranged to adjust a temperature of the heat-transfer fluid for each of the plurality of equipment, the thermal unit comprising:
• a first fluid unit constructed and arranged to control the temperature of the heat-transfer fluid to a first temperature;
• a second fluid unit constructed and arranged to control the temperature of the heat transfer fluid to a second temperature;
• and
• an outlet flow control unit that is in fluid communication with the channel of each of the plurality of equipment and the first and second fluid units, the outlet flow control unit being constructed and arranged to supply the channel of each of the plurality of equipments with the controlled heat transfer fluid comprising at least one of the heat-transfer fluid having a first temperature, the heat transfer fluid having a second temperature or a combination thereof.

A method of controlling a temperature of a substrate supported by a thermal surface of a substrate table, the substrate table including a fluid thermal assembly in thermal communication with the thermal surface, the method comprising:

• adjusting a heat-transfer fluid of a first source of heat-transfer fluid to a first temperature;
• adjusting a heat-transfer fluid of a second source of heat-transfer fluid to a second temperature;
• and
• supplying the fluid thermal assembly with a controlled heat-transfer fluid comprising the heat-transfer fluid from the first source of heat-transfer fluid or the heat-transfer fluid from the second source of heat-transfer fluid, or a combination thereof.