Mold structures, and method of transfer of fine structures
OwnerMasahiko Ogino, Akihiro Miyauchi +2inventors
InventorsMasahiko Ogino, Akihiro Miyauchi, Sigehisa Motowaki, Kosuke Kuwabara
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Abstract
A mold and a pattern transfer method using the same for a nanoprinting technology. The mold can be released from a substrate accurately and easily. The mold, which is used for forming a fine pattern on a substrate using a press machine, comprises a release mechanism.
Claims23
A nanoprint mold for forming a fine structure on a substrate with the use of a press machine, said mold comprising a release mechanism.
A pattern transfer method for forming a fine structure on a substrate with the use of a press machine and a nanoprint mold, wherein said mold comprises a release mechanism.
Dependencies are inferred from the claim text.