Methods of forming semiconductor constructions
AssigneeMicron Technology, Inc.
InventorYoshiki Hishiro
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Abstract
The invention includes a semiconductor construction comprising a semiconductor substrate, and a first layer comprising silicon and nitrogen over the substrate. A second layer comprising at least 50 weight % carbon is over and physically against the first layer, and a third layer consisting essentially of a photoresist system is over and physically against the second layer. The invention also includes methodology for forming the semiconductor construction.
Claims38
A semiconductor construction, comprising:
- a semiconductor substrate;
- a first layer comprising silicon and nitrogen over the substrate;
- a second layer comprising at least 50 weight % carbon over and physically against the first layer;
- and
- a third layer consisting essentially of a photoresist system over and physically against the second layer.
A semiconductor construction, comprising:
- a semiconductor substrate;
- a first layer comprising silicon and nitrogen over the substrate;
- a second layer over and physically against the first layer, the second layer being an organic material comprising carbon-hydrogen bonds;
- and
- a third layer consisting essentially of a photoresist system over and physically against the second layer.
A method of forming a semiconductor construction, comprising:
- providing a semiconductor substrate;
- forming a first layer comprising silicon and nitrogen over the substrate;
- forming a second layer comprising at least 50 weight % carbon over and physically against the first layer;
- and
- forming a third layer consisting essentially of a photoresist system over and physically against the second layer.
A method of forming a semiconductor construction, comprising:
- providing a semiconductor substrate;
- forming a first layer comprising silicon and nitrogen over the substrate;
- forming a second layer comprising at least 50 weight % carbon over the first layer;
- forming a third layer consisting essentially of a photoresist system over and physically against the second layer;
- exposing a first portion of the third layer radiation while not exposing a second portion to the radiation;
- subjecting the third layer to conditions which cause either the exposed first portion or unexposed second portion of the photoresist system to release acid;
- the second layer also releasing acid as the third layer is exposed to the conditions;
- and
- after subjecting the third layer to the conditions, removing either the first or second portion selectively relative to the other of the first and second portion.
Dependencies are inferred from the claim text.