Tank for epitaxy installation and installation comprising such a tank
AssigneeAddon, a corporation of France
InventorsOlivier Grange, Pierre Bouchaib
Life of this patent
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Abstract
A tank for producing arsenic vapor including a crucible located inside an exterior enclosure which isolates the crucible from the ambient atmosphere such that a space exists between the crucible and the exterior enclosure, the space being subjected to a pressure lower than atmospheric pressure, the crucible having an outlet duct and an input flange located at or adjacent a superheated portion of the crucible.
Claims13
A tank for producing arsenic vapor comprising a crucible located inside an exterior enclosure which isolates the crucible from the ambient atmosphere such that a space exists between the crucible and the exterior enclosure, the space being subjected to a pressure lower than atmospheric pressure, the crucible having an outlet duct and an input flange located at or adjacent a superheated portion of the crucible.
Dependencies are inferred from the claim text.