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US 2004/0070387 A1Published application
Water staging platform
AssigneeAugust Technology Corp.
InventorCraig K. Carlson-Stevermer
Life of this patent
Estimating the term…
Abstract
A wafer staging platform for use with equipment such as an inspection system for inspecting of semiconductors or like substrates. The platform is designed to reduce the amount of time needed to exchange wafers on a processing tool.
Claims21
A wafer staging platform for a wafer inspection system comprising:
- a first platform for holding a first wafer;
- a second platform aligned with the first platform, the second platform for holding a second wafer;
- wherein the first and second platforms are in close proximity to a processing platform.
A handling system for a wafer inspection system comprising:
- a wafer processing platform;
- a wafer staging platform;
- and
- a robot configured to move wafers between the wafer processing platform and the wafer staging platform.
1 more element
A method for swapping samples in a wafer inspection system comprising:
- providing a sample processing platform;
- providing a first and second sample holder in close proximately to the sample processing platform;
- providing a robot to move samples between the sample processing platform and the first and second sample holders;
- moving a first sample from the sample processing platform to the first sample holder;
- and
- moving a second sample from the second sample holder to the sample processing platform.
3 more elements
Dependencies are inferred from the claim text.