Cassette
OwnerChun-Kai Huang, Ming-Hui Changinventors
Life of this patent
Estimating the term…
Abstract
The present invention relates to a supporting plate (10) and a cassette (20) for accommodating substrates using the same. The supporting plate includes a main body (11) and at least two stiff shafts (13). The main body includes a plurality of wing panels (15) extending from the main body and at least two through grooves (18). A space interval (17) is defined between neighboring wing panels, each wing panel comprises a plurality of protrusions (151) extending from the free side of each wing panel, and the wing panels slope down. The two stiff shafts being received in the two through grooves.
Claims19
A supporting plate for supporting substrates, comprising:
- a main body having a plurality of wing panels extending from the main body and at least two through grooves,
- at least two stiff shafts being received in the two through grooves,
- wherein each wing panel comprises a plurality of protrusions extending from the free side of each wing panel, and the wing panels slope down.
A cassette for accommodating a plurality of substrates in mutual isolation, comprising:
- a pair of frames, and
- at least a pair of supporting plate fixed to the frames, each supporting plate comprising:
- a main body having a plurality of wing panels extending from the main body and at least two through grooves,
- at least two stiff shafts being received in the two through grooves,
- wherein space interval is defined between neighboring wing panels, each wing panel comprises a plurality of protrusions extending from the free side of each wing panel, and the wing panels slope down.
A cassette for supporting substrates, comprising:
- a pair of frames, and
- at least a pair of supporting plates fixed to the frames,
- wherein each two supporting plates face each other, and each supporting plate defines a plurality of wing panels on an inward facing side, each wing panel comprises a plurality of protrusions extending from a free side of each wing panel, and the wing panels slope down.
Dependencies are inferred from the claim text.