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US 2004/0069234 A1Published application
Sheet-type treating device
OwnerShigeru Kasai, Hiroyuki Miyashitainventors
Life of this patent
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Abstract
This invention relates to a thermal processing method including: a placing step of placing an object to be processed onto a stage arranged in a processing container that can be vacuumed; and a heating step of heating the object to be processed to a predetermined temperature. The object to be processed is heated under a state in which a temperature distribution is maintained in such a manner that a temperature at a central portion of the object to be processed is high while a temperature at a peripheral portion of the object to be processed is low, during at least a part of the heating step.
Claims20
A thermal processing method comprising:
- a placing step of placing an object to be processed onto a stage arranged in a processing container that can be vacuumed, and
- a heating step of heating the object to be processed to a predetermined temperature,
- wherein the object to be processed is heated under a state in which a temperature distribution is maintained in such a manner that a temperature at a central portion of the object to be processed is high while a temperature at a peripheral portion of the object to be processed is low, during at least a part of the heating step.
(Amended) A thermal processing method comprising:
- a placing step of placing an object to be processed onto a stage arranged in a processing container that can be vacuumed, and
- a heating step of heating the object to be processed to a predetermined temperature by heating the stage,
- wherein a pressure in the processing container is set equal to or lower than a viscous flow, during at least a part of the heating step.
A thermal processing unit comprising:
- a processing container that can be vacuumed,
- a stage arranged in the processing container, on which an object to be processed is placed,
- a plurality of zone-heating parts that independently heat respective concentrically divided zones of the object to be processed,
- an electric-power supplying unit that supplies electric power to each of the plurality of zone-heating parts,
- a temperature measuring unit provided correspondingly to at least one of the zones of the object to be processed, and
- an electric-power controlling unit that controls the electric-power supplying unit based on a value detected by the temperature measuring unit in such a manner that the object to be processed is heated to a predetermined temperature under a state in which a temperature distribution is maintained wherein a temperature at a central portion of the object to be processed is high while a temperature at a peripheral portion of the object to be processed is low.
3 more elements
A thermal processing unit comprising:
- a processing container that can be vacuumed,
- a stage arranged in the processing container, on which an object to be processed is placed,
- a heating part that heats the object to be processed in such a manner that a predetermined temperature distribution is formed,
- an electric-power supplying unit that supplies electric power to the heating part, and
- an electric-power controlling unit that controls the electric-power supplying unit in such a manner that the object to be processed is heated to a predetermined temperature under a state in which a temperature distribution is maintained wherein a temperature at a central portion of the object to be processed is high while a temperature at a peripheral portion of the object to be processed is low.
2 more elements
A thermal processing unit comprising:
- a processing container that can be vacuumed,
- a stage arranged in the processing container, on which an object to be processed is placed,
- a heating part that heats the object to be processed in such a manner that a concentric temperature distribution is formed,
- an electric-power supplying unit that supplies electric power to the heating part,
- a temperature measuring unit provided correspondingly to at least one position of the object to be processed, and
- an electric-power controlling unit that controls the electric-power supplying unit based on a value detected by the temperature measuring unit in such a manner that the object to be processed is heated to a predetermined temperature under a state in which a temperature distribution is maintained wherein a temperature at a central portion of the object to be processed is high while a temperature at a peripheral portion of the object to be processed is low.
3 more elements
A thermal processing unit comprising:
- a processing container that can be vacuumed,
- a stage arranged in the processing container, on which an object to be processed is placed,
- a plurality of zone-heating parts that independently heat respective concentrically divided zones of the object to be processed,
- an electric-power supplying unit that supplies electric power to each of the plurality of zone-heating parts,
- a power detecting unit that detects respective power supplied from the electric-power supplying unit to the respective zone-heating parts or respective power emitted from the respective zone-heating parts,
- an electric-power controlling unit that controls the electric-power supplying unit based on a value detected by the power detecting unit in such a manner that the object to be processed is heated to a predetermined temperature under a state in which a temperature distribution is maintained wherein a temperature at a central portion of the object to be processed is high while a temperature at a peripheral portion of the object to be processed is low.
3 more elements
A thermal processing unit comprising:
- a processing container that can be vacuumed,
- a stage arranged in the processing container, on which an object to be processed is placed,
- a heating part that heats the object to be processed in such a manner that a concentric temperature distribution is formed,
- an electric-power supplying unit that supplies electric power to the heating part,
- a power detecting unit that detects power supplied from the electric-power supplying unit to the heating part or power emitted from the heating part,
- an electric-power controlling unit that controls the electric-power supplying unit based on a value detected by the power detecting unit in such a manner that the object to be processed is heated to a predetermined temperature under a state in which a temperature distribution is maintained wherein a temperature at a central portion of the object to be processed is high while a temperature at a peripheral portion of the object to be processed is low.
3 more elements
Dependencies are inferred from the claim text.