Reduced splattering of unpassivated laser fuses
AssigneesInfineon Technologies AG, International Business Machines Corporation
InventorsGerald R. Friese, Andy Cowley, Mohammed Fazil Fayaz, William T. Motsiff
Life of this patent
Estimating the term…
Abstract
The act of blowing an unpassivated electrical fuse (for example, fuse 405) using a laser can result in the splattering of the fuse material and result in electrical short circuits. A blast barrier (for example blast barrier 406) formed around an area of the fuse that is blown by the laser helps to contain the splattering of the fuse material. The blast barrier may be formed from the same material as the fuses themselves and therefore, can be created in the same fabrication step.
Claims26
A semiconductor device comprising:
- a first electrical contact pad;
- a second electrical contact pad;
- a fusable link made of a conductive material, the fusable link having a first end coupled to the first electrical contact pad and a second end coupled to the second electrical contact pad, the fusable link to become non-conductive after application of an energy source;
- and
- a blast barrier horizontally enclosing the fusable link, the blast barrier to contain fusable link material expelled as a result of the application of the energy source.
A method for creating a blast barrier for a semiconductor device comprising:
- forming a first and a second electrical contact pad;
- forming a fusable link that is coupled to the first and second electrical contact pads;
- and
- forming a conductive blast barrier, the blast barrier having a first piece formed in parallel to the fusable link and a second piece formed in parallel to the fusable link and on an opposite side of the fusable link from the first piece.
A structure comprising:
- a first and second pad;
- a first metal line formed between the first and second pads, the first metal line touching the first and second pads;
- and
- a second and third metal line formed on opposite sides of the first metal line, the second and third metal lines separated from the first metal line by a margin equal to a specified distance.
The structure claim of 22, wherein the second and third metal lines do not touch the fourth and fifth metal lines.
Dependencies are inferred from the claim text.