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AssigneeNippon Shokubai Co., Ltd.
InventorsYohei Murakami, Masatoshi Yoshida, Osamu Konosu, Shinichi Goto, Motohiro Arakawa, Tadayoshi Ugamura
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It is an object of the present invention, which has been made in view of the above-mentioned state of the art, to provide a protolytically leaving group-containing copolymer which can exhibit high levels of changes in characteristics, such as solubility in alkaline aqueous solutions after free proton treatment as compared with the, solubility before such treatment, and of substrate adhesion, developability, chemical resistance and etching resistance and which can judiciously be applied in various fields of application. The present invention is related to a protolytically leaving group-containing copolymer which is a copolymer having hydroxyl groups each bound to the main chain thereof via one carbon atom, aromatic rings, and protolytically leaving groups, wherein said protolytically leaving group-containing copolymer showing an alkali dissolution rate of 20×10−10 to 1,500×10−10 m/second prior to protolytically leaving group elimination.
A protolytically leaving group-containing copolymer which is a copolymer having hydroxyl groups each bound to the main chain thereof via one carbon atom, aromatic rings, and protolytically leaving groups, wherein said protolytically leaving group-containing copolymer showing an alkali dissolution rate of 20×10−10 to 1,500×10−10 m/second prior to protolytically leaving group elimination.
Dependencies are inferred from the claim text.