US 2003/0215311 A1 · Mobile adjustment device for standard mechanical interface (SMIF) arm

Abstract

A mobile adjustment device for a standard mechanical interface (SMIF) arm is disclosed. The mobile adjustment device allows precise positioning of the SMIF arm relative to semiconductor processing equipment in three dimensions. The mobile adjustment device can include at least a number of wheeled legs, a bolt rod, and a sliding seat. The wheeled legs and the sliding seat allow for positioning the SMIF arm to two horizontal dimensions, whereas the bolt rod allows for positioning the SMIF arm in a vertical dimension, for a total of three dimensions.

Claims20

Dependent claims

A mobile adjustment device for a standard mechanical interface (SMIF) arm comprising:

a plurality of wheeled legs to provide for horizontal movement of the SMIF arm in a first direction;
a platform on which the SMIF arm rests;
a bolt rod attached to the platform to provide for vertical movement of the SMIF arm;
a sliding seat situated over the plurality of wheeled legs to provide for horizontal movement of the SMIF arm in a second direction;
a sliding plate pressure block in which the bolt rod is situated;
and,
a bottom connection plate securing the sliding seat to the sliding plate pressure block.

4 more elements

Dependencies are inferred from the claim text.

Mobile adjustment device for standard mechanical interface (SMIF) arm

Life of this patent

Mobile adjustment device for standard mechanical interface (SMIF) arm

Life of this patent

Abstract

Claims20