Loading patent…
AssigneeThe Regents of the University of California
InventorsJeffrey J. Peterson, Charles E. Hunt
Estimating the term…
One embodiment of the present invention provides a system that facilitates construction of electromagnetic, optical, chemical, and mechanical systems using chemical endpoint detection. The system operates by receiving a system description that specifies multiple components, including a first component and a second component. The system fabricates the first component and the second component using selected construction materials. The system also creates a first interconnection structure on the first component and a second interconnection structure on the second component. These interconnection structures can be created using a sacrificial layer and chemical endpoint detection. Next, the system brings the first component and the second component together by connecting the first interconnection structure and the second interconnection structure. These interconnection structures align the first component to the second component so that accurate alignment can be achieved.
A method to facilitate construction of electromagnetic, optical, chemical, and/or mechanical systems using chemical endpoint detection, comprising:
A method to facilitate construction of a system using an interconnection structure, comprising:
An apparatus to facilitate construction of electromagnetic, optical, chemical, and mechanical systems using chemical endpoint detection, comprising:
A method to facilitate using photolithographic techniques to facilitate precise mechanical alignment via alignment structures, comprising:
Dependencies are inferred from the claim text.