Multiple-nozzle thermal evaporation source
AssigneeUniversity of Delaware
InventorsErten Eser, Gregory M. Hanket
Life of this patent
Estimating the term…
Abstract
A multiple nozzle thermal evaporation source includes a plurality of nozzles having a tapered shape. The nozzles may comprise a thermally conductive material having a low emissivity material.
Claims11
In a multiple nozzle thermal evaporation source having a containment box with an evaporation chamber and a heater and having heat shielding and having a plurality of effusion nozzles, the improvement being in that the exterior of the nozzles have a tapered shape to increase the thermal conductance of the nozzles and reduce the temperature gradient, and the tapered nozzles being made of thermally conductive material with low emissivity.
In a multiple nozzle thermal evaporation source having a containment box with an evaporation chamber and a heater and having heat shielding and having a plurality of effusion nozzles, the improvement being in that the exterior of the nozzles have a tapered shape to increase the thermal conductance of the nozzles and reduce the temperature gradient, the tapered nozzles being made of a material comprising thermally conductive material with low emissivity, and the low emissivity material being selected from the group consisting of yttrium oxide, zirconium oxide, aluminum oxide and boron nitride.
In a multiple nozzle thermal evaporation source having a containment box with an evaporation chamber and a heater and having heat shielding and having a plurality of effusion nozzles, the improvement being in that the exterior of the nozzles have a tapered shape to increase the thermal conductance of the nozzles and reduce the temperature gradient, the tapered nozzles being made of thermally conductive material, and the external and internal surfaces of the nozzles having direct line of sight to the surrounding environment and being coated with a low emissivity material.
Dependencies are inferred from the claim text.