Reciprocating megasonic probe

An apparatus for cleaning substrates, said apparatus comprising:

• a rotary support which is adapted to support and rotate said substrate about a first axis;
• a transmitter extending generally parallel to a surface of said substrate;
• a megasonic transducer in acoustically coupled relation to said transmitter;
• and
• a reciprocation drive in fixed relation to said transmitter, said reciprocation drive moving said transmitter back-and-forth within a plane generally parallel to said surface of said substrate.

A method of cleaning a substrate, the method comprising:

• placing said substrate on a rotating fixture;
• placing a liquid on at least one side of said substrate;
• creating a standing wave of megasonic energy oriented generally parallel to said substrate, said standing wave generating an associated pattern of high-agitation regions in said liquid;
• and
• causing back-and-forth movement of said standing wave relative to said substrate or vice versa so as to move said pattern of high-agitation regions about with respect to said substrate.

A method of cleaning a substrate, the method comprising:

• placing said substrate on a rotating fixture;
• applying a liquid to at least one side of said substrate;
• creating a wave of megasonic energy oriented generally parallel to said substrate, said wave generating high-agitation regions in said liquid;
• and
• moving said high-agitation regions about with respect to said substrate.