Raw material compounds for use in CVD, and chemical vapor depsoition of ruthenium compound thin films
AssigneeTanaka Kikinzoku Kogyo K.K.
InventorsMasayuki Saito, Takeyuki Sagae
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Abstract
This invention provides raw material compounds for use in CVD which contain organic ruthenium compounds as a main ingredient, the organic ruthenium compounds having two β-diketones plus one diene, one diamine or two organic ligands which are coordinated with ruthenium. In this invention, the vapor pressures of the organic ruthenium compounds are made preferable by specifying the number of the carbon atoms contained in the above β-diketones and the types of the above diene etc.
Claims11
Raw material compounds for use in CVD which contain organic ruthenium compounds as a main ingredient, wherein the organic ruthenium compounds have two β-diketones and one diene coordinated with ruthenium as shown by the following structural formula:
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- wherein the substituents R1, R2 of the β-diketones are alkyl groups, the total number of carbon atoms contained in R1, R2 is 3 to 5, and the organic groups R3, R4, R5 constituting the diene may be linked to one another to form a ring.
Raw material compounds for use in CVD which contain organic ruthenium compounds as a main ingredient, wherein the organic ruthenium compounds have two β-diketones and one diamine coordinated with ruthenium as shown by the following structural formula:
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- wherein the substituents R1, R2 of the β-diketones are alkyl groups, the total number of carbon atoms contained in R1, R2 is 2 to 5, the substituents R6, R7, R8, R9, R10 and R11 of the diamine are independently selected from the group consisting of hydrogen and alkyl group, and the total number of carbon atoms contained in R6, R7, R8, R9, R10 and R11 is 2 to 8.
Raw material compounds for use in CVD which contain organic ruthenium compounds as a main ingredient, wherein the organic ruthenium compounds have two β-diketones and two organic ligands coordinated with ruthenium as shown by the following structural formula:
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- wherein the substituents R1, R2 of the β-diketones are alkyl groups, the total number of carbon atoms contained in R1, R2 is 2 to 5, and the organic ligand R12 is any one selected from the group consisting of olefin, amine, nitrile and carbonyl.
Dependencies are inferred from the claim text.