C-chuck insulator strip
OwnerNathan Houseinventor
Life of this patent
Estimating the term…
Abstract
A susceptor assembly and an insulator strip for a susceptor assembly to reduce or eliminate arcing and temperature spikes between a ground cable and a thermocouple wire in susceptor and C-chuck assemblies. In one embodiment of the invention, an insulator strip is placed between the thermocouple lead and the ground cable in a susceptor assembly support arm channel.
Claims20
An insulator strip for a susceptor assembly including a support arm having a support arm channel, a ground strap and a thermocouple lead, the insulator strip comprising a strip of an insulating material configured for placement in the support arm channel between the ground strap and the thermocouple lead.
A susceptor assembly comprising:
- a susceptor disk;
- an insulating support disk attached to an underside of the susceptor disk;
- a support arm attached to and supporting the susceptor disk and the insulating support disk, the susceptor support arm including a channel;
- a ground wire conductively connected to the susceptor disk and extending along a length of the channel of the support arm;
- a thermocouple lead connected to the susceptor disk and extending along a length of the channel of the support arm;
- and
- an insulator strip extending along a length of the channel of the support arm, ii the insulator strip including a strip of an insulating material configured for placement in the channel of the support arm between the ground strap and the thermocouple lead.
A susceptor assembly for processing a substrate at temperatures of up to 500 degree Celsius comprising:
- a susceptor having a substantially planar surface for supporting a substrate;
- a ceramic susceptor support arm supporting the susceptor, the susceptor support arm including an open channel for routing wiring from a hub end of the support arm adjacent to the susceptor to a support end of the support arm distal from the susceptor, wherein the channel includes a removable channel cover attached to the support arm to enclose a portion of the conductor in the channel a susceptor disk;
- an insulating support disk attached to an underside of the susceptor disk;
- a ground wire conductively connected to the susceptor disk and extending along a length of the channel of the support arm;
- a thermocouple lead connected to the susceptor disk and extending along a length of the channel of the support arm;
- an insulator strip extending along a length of the channel of the support arm, the insulator strip including a strip of an insulating material configured for placement in the channel of the support arm between the ground strap and the thermocouple lead;
- and
- a removable channel cover attached to the support arm to enclose a portion of the conductor and the insulator strip in the channel.
Dependencies are inferred from the claim text.